These systems can be provided as separate components or complete integrated motion systems with custom interfaces, cable management solutions, vacuum feed-throughs, and application-specific granite ...
Wafer metrology systems require extremely high geometric precision of all involved motion systems. Air bearing slides, rotary tables and low-profile air bearing Z-axis and tip/tilt stages provide the ...
Newport Corporation introduces the HXP1000 Hexapod, a high load, 6-axis-parallel kinematic positioning system that can accommodate a centered load of 450 kg or a load of 200 kg in any orientation. The ...
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